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Ultra Flat 

 

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Corning Tropel Corporation designed the TropelŪ UltraFlatTM 200 Mask System specifically for the photomask industry. It delivers the lowest measurement uncertainty for ever-tightening mask flatness specifications. Shrinking device features require not only flatter wafers, but flatter masks. The UltraFlat system is used to measure flatness of photoblanks and photomasks throughout every stage of manufacturing and use, including, substrate polishing, coating and patterning to analyze film stress, and verification.

UltraFlat system utilizes near-normal incidence interferometry, rock solid structural design, state-of-the-art optical fabrication techniques and Tropel's renowned phase shifting analysis software to deliver 20 nanometer measurement uncertainty. The system is NIST traceable and provides measurements that conform to SEMI standards. 

An automated photomask handling and measurement configuration (not shown in photo) is also available.

 

Specifications:
Uncertainty 20 nm  (0.8 u")
Dynamic Range 10 um  (typical, limited by surface slope)
Mask Sizes < 6"  (6025, 5009 and others upon request)
Measured Data Points ~ 1,000,000 per measurement
Measurement Time < 30 seconds
Standard Measurements Front referenced flatness, local slope, stress, microwaviness, x-y polyfit
Data Analysis 3-D, contour, isometric, histogram, site plots, site analysis
Options:
Automated part handling
Enclosure

Please contact us for more specific application and performance information!

 

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Last modified: May 17, 2006