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Legend Specs 

 

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Measuring Volume

X Axis 300mm  (12")
Y Axis 300mm  (12")    OR   457mm  (18")
Z Axis 300mm  (12")

 

Overall Size

Height 68"
Length 56"
Width 36"
Weight 1700 lbs

 

Volumetric Accuracy                                2.0um   (80u inches)

System Resolution (combined)                 0.1um   (4u inches)

Measuring repeatability (zero force mode)          0.2um   (8u inches)

 

Positional Accuracy (bandwidth over full travel)

X Axis in center of table at table height 1.0um  (40u inches)
Y Axis in center of table at table height 1.0um  (40u inches)
Z Axis in center of table, perpendicular to table 1.0um  (40u inches)

 

 

 

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Last modified: August 08, 2001